• Accelerating voltage: 0.02 to 30kV
  • Resolution:
    • 0.8 nm @ 15 kV
    • 1.6 nm @ 1 kV
    • 0.8 nm @ 30 kV (STEM mode)
  • Probe current: up to 20nA
  •  Vacuum modes:
    • High Vacuum
    • Variable pressure up to 60 Pa
  •  Detectors:
    • High efficiency secondary electron detector HE-SE2 - Everhart-Thornley type
    • In-lens Duo detector - combination of In-lens SE and In-lens BSE imaging
    • Scanning transmission electron microscopy detector
    • Variable pressure secondary electron detector
    • Cathodoluminescence detector for material characterization 
  • 5-axes mot. eucentric stage with dual joystick controller
  • Plasma Cleaner for gentle removal of sample contamination
  • Local Charge Compensation for undisturbed imaging of non-conductive samples and in situ cleaning of sample surface
  • ATLAS Array Tomography for 3D reconstruction of sample data    

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