FS-1 Multi-Wavelength Ellipsometer


The FS-1 Multi Wavelength Ellipsometer acquires ellipsometric data across 4 discrete bands in the visible spectrum, with the bands centered at 465 nm (blue), 525 nm (green), 580 nm (yellow), and 635 nm (red). It enable unique determination of film thickness for transparent films and determine additional sample parameters such as surface roughness, multiple film thicknesses, and index dispersion. 


User Support and  Scientific Advice


Responsible: Juan Luis Aguilera  juan.aguilera@remove-this.ist.ac.at

Substitute: Philipp Taus  philipp.taus@remove-this.ist.ac.at  

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