• Gasses: BCl3, Cl2, SF6, CHF3, C4F8, O2, Ar
  • Vacuum load lock
  • Showerhead gas inlet optimized for RIE
  • High conductance vacuum layout
  • PC 2000 Control
  • ICP source 1200 W at 13.56 MHz
  • Substrate electrode temperature range: -30 - + 80 °C

 

 

 

User Support and  Scientific Advice

 

Responsible: Juan Luis Aguilera  juan.aguilera@remove-this.ist.ac.at

Substitute: Philipp Taus  philipp.taus@remove-this.ist.ac.at  


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