AlphaStep D-600 Stylus Profiler 

The Alpha-Step D-600 Stylus Profiler is a high resolution 2D & 3D profiling, 2D stress, profile stitching - in an easy-to-use platform. This system includes a 200 mm motorized stage, with 150 mm x 178 mm X-Y range of motion and an optical lever sensor technology. The system also includes advanced optics and enhanced video controls for sample visualization.

  • Manual X/Y stage 4-inch travel and 360 degree rotation
  • Vacuum chuck, 1 to 15mg force
  • Highest vertical range at 1200 μm
  • Low force measurements at 0.03 to 15 mg
  • Step height repeatability of 5 Å on a 1 μm step
  • High resolution 5 MP color camera with 4x digital zoom
  • Software features: Keystone correction, arc correction, sequencing, and automated stitching
  • Intuitive user interface



User Support and  Scientific Advice


Responsible: Lubuna Shafeek

Substitute:  Philipp Taus



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