Plassys MEB 550S2

The MEB 550 S2 is a UHV  type evaporator with three chambers. This computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and   oxygen gas inlet for  oxidation of tunnel barriers. The source chamber is cryo pumped and separated  from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching. 

Allowed metals: Al, Nb, Ti

 

 

 

 

 

  • Source chamber with a linear 4x 15 cc UHV ebeam source
  • Treatment chamber above the source chamber
  • Lateral Sample load lock for a 4" substrate
  • Possibility for in-situ oxidation

 

User Support and  Scientific Advice

 

Responsible: Lubuna Shafeek lubuna.shafeek@remove-this.ist.ac.at

Substitute: Juan Luis Aguilera juan.aguilera@ist.ac.at

 

 

⇐ back to previous page