Our Nanofabrication Facility provides ...

  • Cleanroom equipped with the state of the art for micro- and nanofabrication processing
  • Specialized staff who guarantee the availability of processing equipment and the development of new processing
  • Training and availability for all users

Description of IST Cleanrooms


The cleanroom is divided in two units located in the ground floor and in the basement of the Building West (I21) at IST Austria.

Ground floor:

The main part of the cleanroom is allocated at this floor. 

It will be separated in the following areas:

  • Photo-Lithography (20 sqm)
  • Wet Chemistry (25 sqm)
  • Deposition (24 sqm)
  • Dry etching (25 sqm)
  • Characterization (26 sqm)
  • PDMS fabrication (17 sqm)
  • Tool move in (18 sqm)
  • Clean room corridoor (57 sqm)
  • Grey area (130 sqm)
Ground Floor


The planned size for the cleanroom in this floor is 70 sqm (with potential extension up to 120 sqm). It will provide the best condition for low vibrational noise, electromagnetic noise and temperature stability.

This unit will be divided into the following areas:

  • Electron beam lithography (21 sqm)
  • Scanning electron microscope (14 sqm)
  • Characterization 1 (10 sqm)
  • Characterization 2 (11 sqm)
  • Clean room corridoor  (20 sqm)
  • Grey area (25 sqm)




Tiny Lab

An additional rooms  for characterization and bonding equipment that cannot be allocated in the cleanroom.

  • Ground floor (18 sqm)
  • 2nd floor (20 sqm)