S/TEM Jeol JEM2800

• Electron gun: Schottky Field Emission
• Accelerating voltage: 100 kV, 200kV
• Imaging modes:
  • Transmission electron microscopy
  • Scanning transmission microscopy
    • bright-field detector
    • dark-field detector
    • secondary electrons detector
• Energy-dispersive X-ray spectroscopy detector Jeol Centurio: large solid angle silicon drift detector   with 100mm2 active area for ultrafast elemental mapping of S/TEM samples
• 3D tomography (TEMography software – recorder, composer, visualizer)
• TEM camera OSIS Veleta
• CMOS TEM camera TemCam-XF416 (EM-Menu SW, EM-Tools SW)
• SerialEM SW
• Single-tilt holder
• Double-tilt EDS dedicated holder
• Multigrid-single-tilt holder (3 grids)
• Double-tilt in situ MEMS-based heating holder Protochip Fusion Select
• 3D tomography (TEMography software – Recorder, Composer, Visualizer)

TEM Tecnai 10

• Electron gun: LaB6
• Accelerating voltage: 80kV, 100kV
• Imaging mode: Transmission electron microscopy
• TEM camera OSIS Megaview G3

TEM Tecnai 12

• Electron gun: LaB6
• Accelerating voltage: 100 kV, 120 kV
• Imaging mode: Transmission electron microscopy
• TEM camera OSIS Veleta
• Cryo Transfer System for observation of frozen samples
• SerialEM SW

FE-SEM Merlin VP Compact + ATLAS Array Tomography

Accelerating voltage: 0.02 to 30kV

Resolution:

• 0.8 nm @ 15 kV
• 1.6 nm @ 1 kV
• 0.8 nm @ 30 kV (STEM mode)

Probe current: up to 20nA

Vacuum modes:

• High Vacuum
• Variable pressure up to 60 Pa

Detectors:

• High efficiency secondary electron detector HE-SE2 – Everhart-Thornley type
• In-lens Duo detector – combination of In-lens SE and In-lens BSE imaging
• Scanning transmission electron microscopy detector
• Variable pressure secondary electron detector
• Cathodoluminescence detector for material characterization
• EDS detector: Octane Elite EDS System with 70 mm2 chip and silicon nitride (Si3N4) window

5-axes mot. eucentric stage with dual joystick controller

Plasma Cleaner for gentle removal of sample contamination

Local Charge Compensation for undisturbed imaging of non-conductive samples and in situ cleaning of sample surface

ATLAS Array Tomography for 3D reconstruction of sample data