Nanofabrication Facility

The Nanofabrication Facility provides a cleanroom that has a space of 450 m² with ISO 7 (class 10000), ISO 6 (class 1000) and ISO 5 (class 100) areas and is equipped with state-of-the-art technology.

The Nanofabrication Facility offers tools that support researchers and PhD students in their research. In addition, it develops, optimizes, and maintains micro- and nanofabrication processes.

For specific further facility details, please visit the Nanofabrication Facility web page:

On this site:


Our Nanofabrication Facility provides …

  • cleanroom equipped with the state-of-the-art technology for micro- and nanofabrication processing
  • specialized staff who guarantee the availability of processing equipment and the development of new processing
  • training and availability for all users

Description of IST Austria Cleanrooms

The cleanroom is divided in two units located on the ground floor and in the basement of Lab and Office Building West (I21).

Ground floor

The cleanroom in the ground floor is 340 m². The main part of the cleanroom is allocated on the ground floor and is divided into following areas:

  • Photo lithography (20 m²)
  • Wet chemistry (25 m²)
  • Deposition (24 m²)
  • Dry etching (25 m²)
  • Characterization (26 m²)
  • PDMS fabrication (17 m²)
  • Tools (18 m²)
  • Clean room corridoor (57 m²)
  • Grey area (130 m²)


The cleanroom in the basement is 70 m² (with potential extension up to 120 m²). It provides the best condition for low vibrational noise, electromagnetic noise and temperature stability. This unit is divided into the following areas:

  • Electron beam lithography (21 m²)
  • Scanning electron microscope (14 m²)
  • Characterization 1 (10 m²)
  • Characterization 2 (11 m²)
  • Clean room corridor  (20 m²)
  • Grey area (25 m²)

Soft wall Cleanroom

The soft wall cleanroom is located in the ground floor with 24 m² of soft wall cleanroom and a grey area of 16 m².

Tiny Lab

There are additional rooms for characterization and bonding equipment that cannot be allocated in the cleanroom.

  • Ground floor (18 m²)
  • 2nd floor (20 m²)




Nasima Afsharimani

Cleanroom Technology/Process Engineering


Juan Aguilera Servin

Cleanroom Technology/Process Engineering

+43 2243 9000 1190


Salvatore Bagiante

Manager Nanofabrication Facility

+43 2243 9000 1174


Stefan Fritze

Cleanroom Technology/Process Engineering

+43 2243 9000 2087


Jack Merrin

Staff Scientist

+43 2243 9000 1103


Rodolfo Previdi

Cleanroom Technology/Process Engineering

+43 2243 9000 2049


Lubuna Shafeek

Cleanroom Technology/Process Engineering

+43 2243 9000 1192


Institute of Science and Technology Austria
c/o Nanofabrication Facility
Am Campus 1, A-3400 Klosterneuburg, Austria

Office: Lab and Office building West, ground floor

Scientific Head of Nanofabrication Facility:
Giorgios Katsaros

Contact for facility questions:

Contact Manager:

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