Nanofabrication Facility

The Nanofabrication Facility provides a cleanroom that has a space of 450 m² with ISO 7 (class 10000), ISO 6 (class 1000) and ISO 5 (class 100) areas and is equipped with state-of-the-art technology and meets the ) standards.


On this site:


Services

Our Nanofabrication Facility provides …

  • Cleanroom equipped with the state-of-the-art technology for micro- and nanofabrication processing
  • Specialized staff who guarantee the availability of processing equipment and the development of new processing
  • Training and availability for all users
      

Description of IST Austria Cleanrooms

The cleanroom is divided in two units located on the ground floor and in the basement of Lab and Office Building West (I21).

Ground floor

The main part of the cleanroom is allocated on the ground floor and is divided into following areas:

  • Photo-Lithography (20 m²)
  • Wet Chemistry (25 m²)
  • Deposition (24 m²)
  • Dry etching (25 m²)
  • Characterization (26 m²
  • PDMS fabrication (17 m²)
  • Tool move in (18 m²)
  • Clean room corridoor (57 m²)
  • Grey area (130 m²)

Basement

The cleanroom in the basement is 70 m² (with potential extension up to 120 m² ). It provides the best condition for low vibrational noise, electromagnetic noise and temperature stability. This unit is divided into the following areas:

  • Electron beam lithography (21 m²)
  • Scanning electron microscope (14 m²)
  • Characterization 1 (10 m²)
  • Characterization 2 (11 m²)
  • Clean room corridoor  (20 m²)
  • Grey area (25 m²)

Tiny Lab

There are additional rooms for characterization and bonding equipment that cannot be allocated in the cleanroom.

  • Ground floor (18 m²)
  • 2nd floor (20 m²)

Equipment


Staff

Avatar

Juan Aguilera Servin

Cleanroom Technology/Process Engineering

+43 2243 9000 1190

Avatar

Salvatore Bagiante

Manager Nanofabrication Facility

+43 2243 9000 1174

Avatar

Arkadiusz Goszczak

Cleanroom Technology/Process Engineering

+43 2243 9000 2087


Avatar

Jack Merrin

Staff Scientist

+43 2243 9000 1103

Avatar

Ivan Prieto

Staff Scientist

+43 2243 9000 2086

Avatar

Lubuna Shafeek

Cleanroom Technology/Process Engineering

+43 2243 9000 1192


Avatar

Philipp Taus

Cleanroom Technology/Process Engineering

+43 2243 9000 2049


Contact

Institute of Science and Technology Austria
c/o Nanofabrication Facility
Am Campus 1, A-3400 Klosterneuburg, Austria

Office: Lab and Office building West, ground floor

Scientific Head of Nanofabrication Facility:
Georgios Katsaros

Contact for facility questions: nff@ist.ac.at

Contact Manager:



Back to Top